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MICROFORM
Author Pouch, J.J.
Title Carbon films grown from plasma on III-V semiconductors [microform] / J.J. Pouch, J.D. Warner, and D.C. Liu.
Imprint [Washington, DC?] : National Aeronautics and Space Administration, [1985?]

Copies/Volumes

LOCATION CALL # STATUS
 GovDocs Federal/Fiche  NAS 1.15:87140    AVAILABLE
Description 1 v.
Series NASA technical memorandum ; 87140.
Note Distributed to depository libraries in microfiche.
Reproduction Microfiche. [Washington, D.C.? : National Aeronautics and Space Administration], 1985. 1 microfiche ; 11 x 15 cm.
Subject Semiconductors.
Other Author Warner, J.D.
Liu, D.C.
United States. National Aeronautics and Space Administration.