BOOK
Author Leedy, T. F.
Title Microelectronic processing laboratory at NBS / Thomas F. Leedy, Yan M. Liu, Electron Devices Division, Center for Electronics and Electrical Engineering, National Engineering Laboratory, National Bureau of Standards.
Imprint Washington : Dept. of Commerce, National Bureau of Standards : U.S. Govt. Print. Off., 1978.

Copies/Volumes

LOCATION CALL # STATUS
 GovDocs Federal  C 13.10:400-  no.52 - 57    AVAILABLE
Description iv, 28 p. : ill. ; 26 cm.
Series Semiconductor measurement technology.
NBS special publication ; 400-53.
Note Bound under title "An Automated Photovoltaic System for the Measurement of Resistivity Variations in High-Resistivity Circular Silicon Slices"
This activity was sponsored by the Defense Advanced Research Projects Agency.
Issued Dec. 1978.
Bibliog. Includes bibliographical references.
Subject Transistors.
Semiconductors -- Testing.
Other Author Liu, Y. M. (Yan M.)
Center for Electronics and Electrical Engineering (U.S.). Electron Devices Division.
United States. Defense Advanced Research Projects Agency.